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ISD-CR (Class 10
Clean Room Actuator)
- Clean room Class 10 (0,1 um) compliance
- A protective stainless sheet helps to restrict the migration
of particles generated from within the actuator, and also reduces
the level of vaccum needed to evacuate the actuator
- Designed for high velocity and high payload, with excellent
repeatability of positioning
- Repeatability: +/-0.02 mm
- Maximum stroke: 1,200 mm
- Maximum speed: 1,000 mm/s
- Maximum payload: 80 kg
- Quick-connect vaccum fittings
- Low-particle generating grease
Optional anti-ESD treatment
Applicable Controllers
 Download
ISD-CR Series Datasheet (1.24 MB)
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